发明名称 CURABLE COMPOSITION FOR IMPRINT, PATTERN FORMING METHOD, AND PATTERN
摘要 PROBLEM TO BE SOLVED: To provide a curable composition for imprint, capable of reducing mold release strength while maintaining pattern transfer performance.SOLUTION: A curable composition for imprinting contains (A) a polyfunctional polymerizable compound, (B) a photopolymerization initiator, and (C) an additive that has a structure selected from among the following structures (1) and a structure selected from among the following structures (2). (1) includes a polyalkylene oxide structure, a polyalkylene glycol ether structure, a polyalkylene glycol ester structure, an amine structure, a phosphoric acid ester group, a sulfonyl group and a sulfuric acid ester group. (2) includes an alkyl structure having 15 or more carbon atoms, an alicyclic structure, a urethane structure and a silicone structure.
申请公布号 JP2014090133(A) 申请公布日期 2014.05.15
申请号 JP20120240442 申请日期 2012.10.31
申请人 FUJIFILM CORP 发明人 GOTO YUICHIRO;DAIMATSU TEI;ENOMOTO YUICHIRO;KITAGAWA HIROTAKA
分类号 H01L21/027;B29C59/02;C08F2/44;C08F2/50 主分类号 H01L21/027
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