发明名称 |
CLEANING AGENT FOR HARD DISK SUBSTRATE, CLEANING FLUID FOR HARD DISK SUBSTRATE, AND METHOD FOR CLEANING HARD DISK SUBSTRATE |
摘要 |
<p>PROBLEM TO BE SOLVED: To provide a cleaning agent for a hard disk substrate capable of more satisfactorily removing particle stains derived from abrasives such as colloidal silica and cerium oxide.SOLUTION: The cleaning agent comprises: (A) component : one or more kinds selected from specified polyoxyalkylene disulfate and specified polyoxyalkylene monosulfate; and (B) component: one or more kinds selected from a specified phosphonic acid based chelating agent and specified organic acid having a sulfone group. The mass ratio represented by the (A) component/the (B) component is preferably (1/99) to (50/50).</p> |
申请公布号 |
JP2014088537(A) |
申请公布日期 |
2014.05.15 |
申请号 |
JP20130019619 |
申请日期 |
2013.02.04 |
申请人 |
LION CORP |
发明人 |
UGA MICHIKO ; ARAI MASAHIRO |
分类号 |
C11D1/37;B08B3/08;C11D1/29;C11D3/34;C11D3/36;C11D3/37;G11B5/84 |
主分类号 |
C11D1/37 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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