发明名称 METHOD FOR PRODUCING SUBSTRATE WITH METAL BODY
摘要 Provided is a method for producing a substrate with a metal body. This method provides excellent film-forming properties (reflectance and adhesion), is easy to be used on a large substrate, and can be carried out at a low cost. The method includes the steps of: (A) heating a complex to a first temperature so as to generate a vapor of the complex; and (B) contacting the vapor with a substrate heated to a second temperature that is not higher than the first temperature so as to form a metal body containing a central metal of the complex, either in uncombined form or as a compound thereof (exclusive of the complex), on at least part of a surface of the substrate. The second temperature in step (B) is lower than the decomposition temperature of the complex. The central metal of the complex is aluminum or titanium.
申请公布号 US2014134331(A1) 申请公布日期 2014.05.15
申请号 US201414159444 申请日期 2014.01.21
申请人 JSR CORPORATION 发明人 SAKAI TATSUYA;NISHIMURA HIDEKI;YAMAMOTO MASAHIRO;NAKAGAWA HISASHI;SAITOU RYUUICHI;AOKI HIDEYUKI;FURUKAWA TSUYOSHI
分类号 C23C16/06 主分类号 C23C16/06
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