| 摘要 |
The invention relates to device for position control of a laser machining beam relative to topographical structural markers, in particular of depressions, in surfaces of workpieces, comprising: a control apparatus (11), a laser beam feed apparatus (3, 4) for providing a laser machining beam (2), a laser beam positioning apparatus (5) controlled by the control apparatus (11), for position control of the laser machining beam (2) on the surface (14) relative to the structural markers (27), and an optical detection apparatus (16) for the structural markers (27), having an illumination apparatus (17) for generating a parallel beam bundle (24), which illuminates the surface (14) having the structural markers (27) to be detected in a scanning field (A), and a camera (25) capturing the scanning field (A) for recording the beam bundle (24), which is reflected by the surface (14) and changed by the structural markers (27), wherein the camera image can be evaluated by the control apparatus (11) for detection of the position of the structural markers (27) and for corresponding position control of the laser machining beam (2). |
