| 摘要 |
PROBLEM TO BE SOLVED: To perform in high quality, a surface treatment such as an electroless plating treatment to a workpiece held in the vertical direction.SOLUTION: A liquid blowout part 4 having a blowout hole 6 is provided on each tank such as an electroless copper plating tank 200. A treatment liquid Q is blown out from the blowout hole 6 of the liquid blowout part 4 to the oblique upside with respect to a horizontal plane toward a planar workpiece 10, to thereby allow the treatment liquid Q to hit on an upper part of the planar workpiece 10 grasped by a hanger 16 for transportation. The treatment liquid Q is allowed to adhere onto the surface of the planar workpiece 10, while the treatment liquid Q is moved down the planar workpiece 10. |
