| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric drive device capable of increasing the stability of scanning of an actuator.SOLUTION: The piezoelectric drive device includes: a feedback control circuit which includes a detection section 10 that detects vibration components from an actuator 2, a detection amplification section 11 that amplifies a detection signal input by the detection section 10, a subtraction section 12 that calculates a difference between the amplified detection signal and a target signal of the actuator 2, and a compensation section 9 that stabilizes the amplitude and the phase characteristic; a drive section 3 that inputs the target signal to the feedback control circuit on the basis of an external input 13; a phase comparison part 5 that calculates a phase difference between a drive signal and the detection signal; a recording section 7 that stores the acceleration components of the actuator 2 and the phase difference; a gain calculation section 6 that adjusts the gain of a drive amplification section 8 and the detection amplification section 11 on the basis of the acceleration component of the detection signal and the phase difference. The piezoelectric drive device is configured to adjust the gain so that the vibration acceleration signal and the phase difference when the external input 13 is changed are identical to the vibration acceleration signal and the phase difference before being stored in the recording section 7. |
