| 摘要 |
<p>The method involves arranging facet mirror elements (3-6) on a facet mirror base (2), where the assembly of the facet mirror elements is partly performed by a robot (10). Each facet mirror element is provided with a unique identification code for automatic identification of the facet mirror element, where the unique identification code is one of an alphanumeric character, a bar code or 2D-code such as a data-matrix code, and the identification code is applied by gluing, painting, writing, or printing. Independent claims are also included for the following: (1) a facet mirror for a projection exposure system (2) a device for manufacturing a facet mirror.</p> |
