发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR
摘要 Provided are a semiconductor device and a manufacturing method therefor. The method comprises: forming on a substrate (1000) a first semiconductor layer (1002) and a second semiconductor layer (1004) in sequence; patterning the second semiconductor layer (1004) and the first semiconductor layer (1002), so as to form an initial fin; selectively etching the first semiconductor layer (1002) in the initial fin, so as to enable same to form transverse indentation; filling a dielectric in the transverse indentation, so as to form a body side wall (1012); forming on the substrate (1000) an isolation layer, the isolation layer exposing a part of the body side wall (1012), thereby limiting the fin located above the isolation layer; and forming above the isolation layer a gate stack across the fin.
申请公布号 WO2014071659(A1) 申请公布日期 2014.05.15
申请号 WO2012CN85248 申请日期 2012.11.26
申请人 INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OFSCIENCES 发明人 ZHU, HUILONG
分类号 H01L29/78;H01L27/00 主分类号 H01L29/78
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