| 摘要 |
PURPOSE: A nozzle unit is provided to prevent the generation of minute fumes and particles which are generated due to drug solution residue by completely cleaning the drug solution remaining in the internal space of a body. CONSTITUTION: A body(312) has an internal space(313) for mixing processing liquid. The body comprises an outlet(314) connected to the internal space in the lower side. The outlet discharges the processing liquid to the lower side. A first supply port(320) supplies first drug solution to the internal space. A purge gas supply pipe for purging the internal space is connected to the first supply port. A second supply port(330) supplies second drug solution to the internal space. A third supply port(340) supplies ultra-pure water of high temperature for cleaning the internal space. |
