摘要 |
PROBLEM TO BE SOLVED: To elongate a lifetime of a scribing wheel.SOLUTION: When a discoid scribing wheel substrate is ground so that a V-shaped tip can be obtained from a circumferential part, grinding is performed so that a grinding striation 14 parallel to a tip ridgeline 15 is formed. Thereafter, a diamond film is formed on the tip by a CVD method. When a brittle material substrate is scribed by using the scribing wheel, exfoliation or break of the diamond film hardly occurs even when the scribing is advanced, to thereby elongate a lifetime of the scribing wheel. |