| 摘要 |
<p>PROBLEM TO BE SOLVED: To accurately detect a pressure variation, enable a detectable lower-limit frequency to be lowered and detect a pressure variation in a low frequency band with excellent sensitiveness.SOLUTION: A pressure sensor 1 includes: a sensor body 3 that is provided with a cavity and a communication opening 11 for communicating between an interior of the cavity and an exterior thereof; a plurality of lever pieces 4A and 4B that are arranged so as to close the communication opening while the distal end parts 4b thereof are free ends and proximal end parts 4a thereof are supported by the sensor body in a cantilever form, and bend and deform in accordance with a pressure difference between the interior of the cavity and the exterior thereof; and a displacement measurement part 5 that measures a displacement of at least any one of the plurality of lever pieces, where the plurality of lever pieces are arranged in such a manner that respective distal end parts face each other at a prescribed gap 12.</p> |
