| 摘要 |
The purpose of the present invention is to make it possible to reuse drying retardant which was used for supercritical drying. A supercritical drying device is provided with a rinse unit (110) for cleaning a work piece with rinse solution (20) as a pre-process for supercritical drying, a supercritical drying unit (120) for performing the supercritical drying for the work piece cleaned with said rinse solution (20), and a transport unit (130) for transporting the work piece between said rinse unit (110) and said supercritical drying unit (120), wherein said supercritical drying unit (120) has an drying retardant supplying unit (140) for supplying drying retardant (30) including the same component as said rinse solution (20) and an drying retardant transportation unit (170) for collecting the drying retardant (30) supplied from said drying retardant supplying unit (140) to said supercritical drying unit (120) and transporting the drying retardant (30) collected from said supercritical drying unit (120) to said rinse unit (110), wherein the drying retardant (30) collected from said supercritical drying unit (120) is reused at least as a part of said rinse solution (20). |
