| 摘要 |
A method of manufacturing a touch panel sensor: a preparation step of preparing a substrate on which a transparent conductive layer is formed; an installation step of installing a patterning member that has patterns in which a first region covering the transparent conductive layer and a second region causing the transparent conductive layer to be exposed are formed; a patterning step of forming an insulation part by implanting at least one of irradiation object out of oxygen, oxygen ions, nitrogen, nitrogen ions, nitrogen oxide, and nitrogen oxide ions into the transparent conductive layer in the portion corresponding to the second region, and for patterning the transparent conductive layer in the portion covered by the first region as a conductive part; and a removing step of removing the patterning member from the transparent conductive layer. |
