发明名称 BREAK DEVICE OF LAMINATED FRAGILE MATERIAL SUBSTRATE, AND BREAK METHOD OF LAMINATED FRAGILE MATERIAL SUBSTRATE
摘要 PROBLEM TO BE SOLVED: To provide a break device of a laminated fragile material substrate and a break method of the laminated fragile material substrate, capable of surely breaking the laminated fragile material substrate together with a layer composed of resin or metal.SOLUTION: In a break bar 14, an abutting part with the substrate 100 has a blade shape composed of an angle &thetas; of 45 degrees or less. The angle &thetas; at a tip of this break bar 14 is desirably 35 degrees or less, and is further desirably 25 degrees or less. When breaking the substrate 100, the break bar 14 is pushed against along a scribe line 99 from a main surface on the side of adding a layer 103 composed of a resin or a metal, and thereby, the layer 103 composed of the resin or the metal is cut, and the substrate 100 is broken.
申请公布号 JP2014087937(A) 申请公布日期 2014.05.15
申请号 JP20120237684 申请日期 2012.10.29
申请人 MITSUBOSHI DIAMOND INDUSTRIAL CO LTD 发明人 TAKEDA MASAKAZU;MURAKAMI KENJI;TAMURA KENTA
分类号 B28D5/00;B26F3/00;H01L21/301 主分类号 B28D5/00
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