发明名称 CERAMIC MATERIAL AND SPUTTERING-TARGET MEMBER
摘要 This ceramic material consists primarily of magnesium, gallium, lithium, and oxygen, and the main phase of this ceramic material is a crystalline solid solution consisting of gallium oxide and lithium oxide in solution in magnesium oxide. Using X-ray diffraction, the copper K-alpha peak of the (200) plane of said solid solution preferably appears at or above 2&thetas; = 42.91°, which is above the peak of cubic magnesium oxide; more preferably appears between 2&thetas; = 42.91° and 2&thetas; = 43.28°, inclusive; and even more preferably appears between 2&thetas; = 42.91° and 2&thetas; = 43.02°, inclusive. It is also preferable that the lithium/gallium molar ratio (Li/Ga) of this ceramic material be in the 0.80-1.20 range.
申请公布号 WO2014073388(A1) 申请公布日期 2014.05.15
申请号 WO2013JP78841 申请日期 2013.10.24
申请人 NGK INSULATORS, LTD. 发明人 SATO, YOSUKE;ISODA, YOSHINORI;KATSUDA, YUJI
分类号 C04B35/053;C23C14/34;G11B5/39;H01L21/8246;H01L27/105;H01L43/08;H01L43/10 主分类号 C04B35/053
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