| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a flow rate control device that can suppress component costs and also save the trouble for wiring.SOLUTION: A flow rate control device (1) includes: two input terminals (171, 172) connected to a slider (W) and a first terminal (C) of an electrically-driven valve unit (2); a voltage detection part (12) for detecting the voltage between the slider and the first terminal on the basis of signals from the two input terminals; and control means (10) of performing control to compute a suitable control gain for position proportional control according to a maximum resistance value characteristic of a variable resistor (23). The control means performs drive control over a motor (21) so as to vary the opening of the valve (22) in one direction, decides whether a motor stops based upon the voltage value obtained from the voltage detection part, and determines a control gain on the basis of a stop-time voltage between the slider and the first terminal when it is determined that the motor stops.</p> |
