| 摘要 |
<p>An angular acceleration sensor comprises: a stationary portion (12); a weight (13); a beam (14) comprising a plate-shaped flat portion (21) for which one end in the extension direction is connected to the stationary portion (12) and the other end is connected to the weight (13), a central convex portion (22) provided in the center, in the width direction, of the flat portion (21) so as to extend in the thickness direction of the flat portion (21), and end convex portions (23A, 23B, 23C, 23D) provided in both ends, in the width direction, of the flat portion (21) so as to project in the thickness direction of the flat portion (21); and a detecting element that detects stress in the beam (14) and that is provided in a location on the flat portion (21) that is not in the center of the extension direction of the flat portion (21).</p> |
