发明名称 Polishing Agent
摘要 The invention relates to the use of gluconates in the production of semiconductor wafers, preferably in the polishing of the semiconductor wafers during the production process, and to a polishing agent based on an abrasive substance and/or colloid and a mixture of disuccinates or methylglycine diacetic acid (MGDA) and gluconates.
申请公布号 KR101395734(B1) 申请公布日期 2014.05.15
申请号 KR20070018184 申请日期 2007.02.23
申请人 发明人
分类号 C09K3/14 主分类号 C09K3/14
代理机构 代理人
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