| 摘要 |
<p>A lens assembly for use in an inspection/repair/inspection system for electrical circuits, the lens assembly including a scan lens operative to correct a laser beam for aberrations at a specific wavelength of the laser beam used for repair and a camera lens operative to receive light from a workpiece through the scan lens and to correct for aberrations at at least one specific wavelength sensed by the camera, which wavelength is other than the specific wavelength of the laser beam used for repair.</p> |
