HIGH SENSITIVITY SURFACE PLASMON ROSONANCE SENSOR USING METALLIC NANO PARTICLES AND METHOD FOR MANUFACTURING THEREOF

摘要

Disclosed in the present invention are a high sensitive surface plasmon resonance sensor applying metallic nanoparticles and a manufacturing method thereof. The disclosed surface plasmon resonance sensor comprises: a first metallic thin film where surface plasmon resonance is generated; metallic nanoparticles which are self-assembled on part of the surface of the first metallic thin film; and a second metallic thin film which is formed on part of the surface of the first metallic thin film or the metallic nanoparticles. Through the present invention, the sensitivity of the surface plasmon resonance sensor can be improved. In addition, the manufacturing method of a high sensitive surface plasmon resonance sensor does not need an additional lithography process in order to generate the metal nanoparticles, has a simple manufacturing process only through an E=beam evaporation process and an RTA process, and can save the manufacturing hours and costs.