| 摘要 |
PROBLEM TO BE SOLVED: To provide a positioning table which is easily assembled and is capable of maintaining a table plate in a correct position when a load is applied. SOLUTION: The positioning table for supporting the table plate via three or more support units that satisfy following conditions above a base, the conditions including (1) each support unit comprises a lifting/lowering device slidably installed on a base surface and a connector for connecting the lifting/lowering device with the table plate; (2) the lifting/lowering device comprises a rail 24 extended along the base surface, a first slide member 21 and a second slide member 22 supported by the rail, a lifting/lowering member 23 supported via a first linear guide 31 tiltingly arranged above the second slide member and connected with the side surface of the first slide member so as to be lifted/lowered via a second linear guide 32, and a drive means 25 for sliding and holding each of the slide members on the rail; and (3) the connector comprises a spherical bearing 34 and a third linear guide 33 for holding the spherical bearing. COPYRIGHT: (C)2012,JPO&INPIT |
