发明名称 HEATER FOR TEMPERATURE COMPENSATION AND HEAT TREATMENT DEVICE WHICH USED THIS
摘要 Disclosed are a heater for temperature compensation and a heat treatment device using the same. The disclosed heater for temperature compensation includes a heating unit which is divided into a heating region and a dummy region extended from both ends of the heating region and emits heat from the heating region; a compensating unit which is divided into a connecting region and a compensating region which extended from both ends of the connecting region and emits heat from the compensating region; and a fixture unit to which the heating unit and the compensating unit are fixed.
申请公布号 KR20140058037(A) 申请公布日期 2014.05.14
申请号 KR20120124552 申请日期 2012.11.06
申请人 ZEUS CO., LTD. 发明人 LEE, JOO HYOUNG
分类号 H05B3/02;H01L21/02 主分类号 H05B3/02
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