| 摘要 |
PROBLEM TO BE SOLVED: To provide a planar surface position detection device that appropriately combines position detection functions of an inductosyn system while maintaining high accuracy. SOLUTION: In a planar surface position detection device, stationary inductosyn substrates for detecting a position in two different directions are arranged in a superposed manner on a scale unit 10, and movable inductosyn substrates for detecting a position in required directions are provided for a slider unit 20 configured to be attached to a detection object so that position detection can be performed. Then, a cancellation unit cancels off electromagnetic coupling of folding portions 52a and 52b of the movable inductosyn substrates with excitation units 41 and 41 of the stationary inductosyn substrates, which originally are not in pair, the electromagnetic coupling causing a detection error. Therefore even if coil patterns of electromagnetic coupling type are combined, position detection without noise and with high accuracy can be achieved. COPYRIGHT: (C)2012,JPO&INPIT |
