发明名称 METHOD FOR LOW TEMPERATURE GROWTH OF INORGANIC MATERIALS FROM SOLUTION USING CATALYZED GROWTH AND RE-GROWTH
摘要 <p>The present invention involves a method and apparatus for depositing a silicon oxide onto a substrate from solution at low temperatures in a manner that produces homogeneous growth of the silicon oxide. The method generally comprises the following steps: (a) Chemically treating a substrate to activate it for growth of the silicon oxide. (b) Immersing the treated substrate into a bath with a reactive solution. (c) Regenerating the reactive solution to allow for continued growth of the silicon oxide. In another embodiment of the present invention, the apparatus includes a first container holding a reactive solution, a substrate on which the silicon oxide is deposited, a second container holding silica, and a means for adding silica to the reactive solution.</p>
申请公布号 EP1579490(B1) 申请公布日期 2014.05.14
申请号 EP20030786878 申请日期 2003.11.18
申请人 WILLIAM MARSH RICE UNIVERSITY 发明人 BARRON, ANDREW, R.;WHITSITT, ELIZABETH, ANNE
分类号 H01L21/31;C23C8/02;C23C8/40;C23C18/00;H01L21/316;H01L21/76 主分类号 H01L21/31
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