| 摘要 |
A moisture-proof film (10) includes a moisture-proof part (12) formed on a surface of a film body (11). The moisture-proof part (12) includes a first layer made of a silicon oxycarbonitride compound containing carbon atoms in a composition thereof, and a second layer made of a silicon oxynitride compound which, in a composition thereof, contains carbon atoms less than those of the first layer or does not contain carbon atoms, and having a density higher than that of the first layer. The first and second layers are stacked adjoining each other. The first layer has a density increasing toward the second layer. |
