发明名称 |
Method of producing an acoustic wave device |
摘要 |
A method of producing an acoustic wave device includes: forming an interdigital electrode on a piezoelectric substrate; forming a barrier film so as to cover the interdigital electrode; forming a medium on the barrier film; measuring a frequency characteristic of an acoustic wave excited by the interdigital electrode; and forming, in an excitation region, an adjustment region having a thickness different from other portions by patterning the barrier film or further providing an adjustment film. When forming the adjustment region, an area T of the adjusting area is adjusted in accordance with the measured frequency characteristic. |
申请公布号 |
US8720022(B2) |
申请公布日期 |
2014.05.13 |
申请号 |
US20090647071 |
申请日期 |
2009.12.24 |
申请人 |
MATSUDA SATORU;MIURA MICHIO;MATSUDA TAKASHI;TAIYO YUDEN CO., LTD. |
发明人 |
MATSUDA SATORU;MIURA MICHIO;MATSUDA TAKASHI |
分类号 |
H03H3/013;H01L41/047 |
主分类号 |
H03H3/013 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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