发明名称 |
Methods for processing substrates in process systems having shared resources |
摘要 |
Methods for processing substrates in twin chamber processing systems having first and second process chambers and shared processing resources are provided herein. In some embodiments, a method may include providing a substrate to the first process chamber of the twin chamber processing system, wherein the first process chamber has a first processing volume that is independent from a second processing volume of the second process chamber; providing one or more processing resources from the shared processing resources to only the first processing volume of the first process chamber; and performing a process on the substrate in the first process chamber. |
申请公布号 |
US8721798(B2) |
申请公布日期 |
2014.05.13 |
申请号 |
US20100916462 |
申请日期 |
2010.10.29 |
申请人 |
CRUSE JAMES P.;CANTWELL DERMOT;XU MING;HARDY CHARLES;SCHWARZ BENJAMIN;COLLINS KENNETH S.;NGUYEN ANDREW;SUI ZHIFENG;LEE EVANS;APPLIED MATERIALS, INC. |
发明人 |
CRUSE JAMES P.;CANTWELL DERMOT;XU MING;HARDY CHARLES;SCHWARZ BENJAMIN;COLLINS KENNETH S.;NGUYEN ANDREW;SUI ZHIFENG;LEE EVANS |
分类号 |
B08B6/00;C25F5/00 |
主分类号 |
B08B6/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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