| 摘要 |
The present invention relates to a foil trap device for debris mitigation, in particular in an EUV system. The foil trap comprises a plurality of spaced apart foils (4) extending from an entrance side towards an exit side of the foil trap, said foils (4) being arranged to allow a straight pass of radiation between the entrance side and the exit side. The foils (4) are coated at least at entrance side edges with a layer (8, 11) of a carbon material containing a fraction of at least 60% of sp3-hybridized carbon atoms, or with a layer (8, 11) of carbon nanotubes. As an alternative, the foils (4) are made of a bulk carbon material of the above composition. The proposed foil trap offers the combination of a high thermal conductivity, a high thermo-chemical resistance against Sn and other liquid metals and a high mechanical stiffness. |
