发明名称 |
Optical element, exposure apparatus based on the use of the same, exposure method, and method for producing microdevice |
摘要 |
An optical element includes a base material, a liquid-repellent member provided on at least a part of a surface of the base material, and a light-reducing member provided between the base material and the liquid-repellent member to protect the liquid-repellent member from radiation of light by reducing the light. The optical element is usable for a liquid immersion exposure apparatus for exposing a substrate through a liquid. It is possible to avoid any inflow of the liquid in a liquid immersion area into an unexpected place via the optical element. |
申请公布号 |
US8724075(B2) |
申请公布日期 |
2014.05.13 |
申请号 |
US20100923282 |
申请日期 |
2010.09.13 |
申请人 |
KOKUBUN TAKAO;HOSHIKA RYUICHI;NIKON CORPORATION |
发明人 |
KOKUBUN TAKAO;HOSHIKA RYUICHI |
分类号 |
G03B27/52 |
主分类号 |
G03B27/52 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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