| 摘要 |
PURPOSE: A substrate separating device is provided to improve the efficiency of a separating process by removing air pressure through performing a separating process of a reinforcement substrate inside a chamber which is formed with a vacuum atmosphere. CONSTITUTION: A process substrate (10) supported at a reinforcement substrate (11) is carried into the inside of a chamber (100). A first surface plate (110) is installed inside the chamber for chucking the process substrate. A second surface plate (120) is installed inside the chamber to be parallel to the first surface plate for chucking the reinforcement substrate. Lifting units (110a, 110b) control the first surface plate to be distant from the second surface plate for separating the process substrate from the reinforcement plate. |
