| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of analyzing a deposit by a laser plasma analysis method without damaging a solid surface.SOLUTION: In the analysis method, a metallic sheet member 14 having a ventilation hole 14b is mounted on a solid surface of an analyzing object S. A laser beam from a laser 13 for plasma generation is radiated obliquely to the metal surface of the sheet member 14. Here, when the laser 13 radiates gas to the metal surface of the sheet member 14, the laser 13 can put atmospheric gas near the sheet member 14 into a plasma state without causing ablation of the sheet member 14 itself. A light emission spectrum of the light emission that is included in the plasma generated near the metal surface of the sheet member 14 and is caused by a deposit on the solid surface is measured. |
