发明名称 METHOD OF MANUFACTURING ELECTRONIC DEVICE, BONDING DEVICE OF CONTAINER FOR ELECTRONIC COMPONENT, ELECTRONIC DEVICE, AND MOBILE APPARATUS
摘要 PROBLEM TO BE SOLVED: To obtain means for improving poor airtightness of a container for electronic component by using an energy beam bonding method.SOLUTION: A bonding method of a container including a base substrate 21, and a lid 22 for forming a space between the base substrate 21 includes a step for preparing the base substrate 21 and the lid 22, a step for arranging the lid 22 in the bonding region 23 of the base substrate 21 so as to overlap, a step for bringing a press part 1 into contact with the outer surface of the lid 22 on the inside of the bonding region 23, and a bonding step for bonding the lid 22 by irradiating an energy beam L, while bringing the press part 1 into contact with the lid 22.
申请公布号 JP2014086522(A) 申请公布日期 2014.05.12
申请号 JP20120233498 申请日期 2012.10.23
申请人 SEIKO EPSON CORP 发明人 MIYASAKA HIDEO;HASHIMOTO KAZUHISA
分类号 H01L23/02;H01L41/08;H01L41/09;H01L41/18;H03H3/02 主分类号 H01L23/02
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