发明名称 |
METHOD OF MANUFACTURING ELECTRONIC DEVICE, BONDING DEVICE OF CONTAINER FOR ELECTRONIC COMPONENT, ELECTRONIC DEVICE, AND MOBILE APPARATUS |
摘要 |
PROBLEM TO BE SOLVED: To obtain means for improving poor airtightness of a container for electronic component by using an energy beam bonding method.SOLUTION: A bonding method of a container including a base substrate 21, and a lid 22 for forming a space between the base substrate 21 includes a step for preparing the base substrate 21 and the lid 22, a step for arranging the lid 22 in the bonding region 23 of the base substrate 21 so as to overlap, a step for bringing a press part 1 into contact with the outer surface of the lid 22 on the inside of the bonding region 23, and a bonding step for bonding the lid 22 by irradiating an energy beam L, while bringing the press part 1 into contact with the lid 22. |
申请公布号 |
JP2014086522(A) |
申请公布日期 |
2014.05.12 |
申请号 |
JP20120233498 |
申请日期 |
2012.10.23 |
申请人 |
SEIKO EPSON CORP |
发明人 |
MIYASAKA HIDEO;HASHIMOTO KAZUHISA |
分类号 |
H01L23/02;H01L41/08;H01L41/09;H01L41/18;H03H3/02 |
主分类号 |
H01L23/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|