发明名称 EXPOSURE APPARATUS
摘要 PROBLEM TO BE SOLVED: To improve the productivity by abbreviating the tact time.SOLUTION: In a case where a control unit C configured in common outputs an alignment commencement signal by selecting one exposure unit from among exposure units 20, 30, 40, 50, ... outputting ready signals 20r, the selected exposure unit not only executes an alignment operation via a drive unit 23 but also outputs, as an exposure condition signal, the exposure time corresponding to the illuminance variation of a light source 26a for exposure irradiation.
申请公布号 JP2014085649(A) 申请公布日期 2014.05.12
申请号 JP20120237189 申请日期 2012.10.26
申请人 ULVAC JAPAN LTD 发明人 NAKAO HIROTOSHI;SATO SEIICHI;IIJIMA EIICHI
分类号 G03F9/00 主分类号 G03F9/00
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