FLOW DISTRIBUTING APPARATUS OF FLUID FOR CVD

摘要

A flow distributing apparatus of fluid for a CVD process is provided. The flow distributing apparatus of fluid for a CVD process according to an embodiment of the present invention includes a chamber having a predetermined space; multiple flow dividing members formed in a multi-layer in the chamber for dividing the flow of the fluid into each layer; and a flow hole formed in each flow dividing member and being increased in number and evenly divided as the number of the layer increases according to the flow of the fluid for uniformly forming the flow of the fluid.