| 摘要 |
A substrate-transfer apparatus according to the present invention comprises: a body frame (1) comprising a driving motor; a driving power transmitting gear (117); a supporting member (130) supporting upper/lower transporting roller shafts (110, 120) to be rotatable on the body frame (1); and upper/lower transporting roller shafts (110, 120) comprising a plurality of disk wheels (111, 121). The supporting member (130) consists of a first, second, and third supporting member (131, 133, 135) and each of the upper/lower transporting roller shafts (110, 120) comprises expansion units (113, 121). |
