发明名称 RESIN MOLD DEVICE AND RESIN MOLD METHOD
摘要 PROBLEM TO BE SOLVED: To provide a resin mold device and a resin mold method which enable a molding to be smoothly released from a mold after the resin molding without impairing the mold quality.SOLUTION: An upper mold 8 is provided with: multiple first vent holes 16a provided at a circumferential groove 16 which is formed enclosing a workpiece holding area; and multiple second vent holes 13e which causes an upper mold clamp surface to suction a release film F or jets air to separate the release film F from the upper mold clamp surface. In a lower mold 7, film support pins 27 which are constantly biased so as to be pressed against the release film F are provided protruding therefrom.
申请公布号 JP2014086633(A) 申请公布日期 2014.05.12
申请号 JP20120235909 申请日期 2012.10.25
申请人 APIC YAMADA CORP 发明人 SAITO TAKASHI
分类号 H01L21/56;H01L33/54 主分类号 H01L21/56
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