| 摘要 |
PROBLEM TO BE SOLVED: To minimize unnecessary emission of particles.SOLUTION: A high speed atom beam source includes a housing 11 and an electrode body 12. The housing 11 has a box shape, includes a grid 14 on one face thereof, and serves as a cathode. The electrode body 12 is provided at the inside of the housing 11, and serves as an anode generating a saddle field type electric field. In at least one of the housing 11 and the electrode body 12, at least a part is formed of a first material hardly sputtered by ions generated by the electric field, or at least a part of a face capable of being irradiated with ions is covered with a coating layer using the first material. |
