发明名称 APPARATUS AND METHOD FOR MEASURING PARALLELISM OF TRANSPARENT BODY
摘要 <p>PROBLEM TO BE SOLVED: To provide an apparatus and a method for measuring parallelism of a transparent body, by which parallelism of the transparent body can be measured highly accurately in a short time.SOLUTION: An apparatus 100 for measuring parallelism of a transparent body, which measures parallelism of a transparent body 90 having a first end surface 90a and a second end surface 90b opposing to each other, includes: a light source 10 for emitting light to be transmitted through the transparent body 90; a light receiving part 80 having a light receiving surface 80a for receiving the light reflected by the first end surface 90a and the second end surface 90b of the transparent body 90; a collimating lens 30; an optical path changing part 40 arranged on an incident optical path, for allowing the light from the collimating lens 30 to transmit therethrough and incident on the transparent body 90, and also for reflecting the light reflected from the first end surface 90a or the second end surface 90b of the transparent body 90 toward the light receiving surface 80a of the light receiving part 80; a position adjusting part 60 that can adjust a position of the transparent body 90; and a condenser lens 70 for condensing the light reflected by the optical path changing part 40 on the light receiving surface 80a of the light receiving part 80.</p>
申请公布号 JP2014085158(A) 申请公布日期 2014.05.12
申请号 JP20120232364 申请日期 2012.10.19
申请人 FUJIKURA LTD 发明人 KABAYAMA KAZUNORI
分类号 G01B11/26 主分类号 G01B11/26
代理机构 代理人
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