发明名称 |
RESIST COMPOSITION, RESIST PATTERN FORMATION METHOD, POLYMERIC COMPOUND, COMPOUND |
摘要 |
PROBLEM TO BE SOLVED: To provide a resist composition and a resist pattern formation method that can improve the dissolution contrast in respect to developer and that can improve the lithography characteristic.SOLUTION: The invention is a resist composition which generates acid upon exposure, and whose solubility in respect to a developer changes in accordance with the action from acid, and it contains a base material component (A) whose solubility in respect to a developer changes in accordance with the action from acid, and the invention is characterized in that the base material component (A) contains a polymeric compound (A1) having a constitutional unit (a0) represented by a general formula (a0-1). In the formula, Ris a hydrocarbon group which may have a substituent having 1 to 5 carbon atoms, Rand Rare a hydrocarbon group which may have a substituent and Rand Rmay bond together to form a ring. |
申请公布号 |
JP2014085642(A) |
申请公布日期 |
2014.05.12 |
申请号 |
JP20120237141 |
申请日期 |
2012.10.26 |
申请人 |
TOKYO OHKA KOGYO CO LTD |
发明人 |
HIRANO TOMOYUKI;KOMURO YOSHITAKA;ARAI MASATOSHI |
分类号 |
G03F7/039;C08F20/28;H01L21/027 |
主分类号 |
G03F7/039 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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