| 摘要 |
PROBLEM TO BE SOLVED: To provide a processing unit advantageous for reducing deformation or vibration that can be transmitted via a chamber of specific internal environment.SOLUTION: A processing unit 1 performs a predetermined processing of a workpiece 3 in a specific environment. The processing unit 1 includes a chamber 5 having an aperture 5e and a specific internal environment, a mechanism 4 having at least a part included in the chamber 5 and another part penetrating from the aperture 5e and in non-contact with the chamber 5, support members 21, 22 for supporting the mechanism 4, a sealing member 20 constituting the boundary of the specific environment and the atmospheric environment, by connecting one end with the aperture 5e and the other end with the support member 22, and rotary members 23, 24 for allowing relative rotation about an axis in the vertical direction between a structure 8 for supporting these support members 21, 22. |
