METHOD OF FABRICATING LIGHT EXTRACTION SUBSTRATE FOR ORGANIC LIGHT EMITTING ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a method of fabricating a light extraction substrate for an organic light emitting element with which the scattering distribution of light emitted from the organic light emitting element can be artificially controlled.SOLUTION: In a method of fabricating a light extraction substrate for an organic light emitting element by an atmospheric pressure chemical vapor deposition process, an inorganic oxide is deposited on a base substrate to form a light extraction layer comprising the inorganic oxide, the inorganic oxide is at least twice deposited in lamination, and a structure of a texture formed on a surface of the light extraction layer is controlled.