| 摘要 |
PROBLEM TO BE SOLVED: To provide a method by which a crosstalk correction coefficient for correcting a crosstalk generated in a measurement system where lighting means emitting a plurality of pieces of monochromatic light of different wavelengths and imaging means for the plurality of pieces of monochromatic light are used, can be obtained with simple device configuration, and to provide a film thickness measurement device of a transparent film having a function of calculating the crosstalk correction coefficient using the method.SOLUTION: A calculation method of a crosstalk correction coefficient of an optical system includes as constituents: the lighting means emitting a plurality of pieces of monochromatic light composed of M pieces of light and having known wavelengths; and the imaging means having spectral sensitivity corresponding to respective wavelengths of the M pieces of monochromatic light. The crosstalk correction coefficient is calculated from interference luminance measurement values of M+1 or more transparent films whose optical film thickness are known and different. |
