| 摘要 |
A multi-charged particle beam writing method of the present invention performs ON/OFF switching of a beam by an individual blanking system for a beam concerned, for each beam in multi-beams of charged particle beam, with respect to each irradiation of irradiation of a plurality of times, by using a plurality of individual blanking systems that individually perform ON/OFF control of the corresponding beam and performs blanking control after performing ON/OFF switching of the beam for each beam by the individual blanking system, with respect to each irradiation of the irradiation of the plurality of times, so that the beam is in an ON state during an irradiation time corresponding to irradiation concerned, by using a common blanking system that collectively performs ON/OFF control of the beam for all multi-beams. |
