HEATING DEVICE OF EVAPORATION SOURCE

摘要

A heating device of an evaporation source is provided. The heating device of the evaporation source according to one embodiment of the present invention includes a hot wire fixing unit whose upper side is opened to insert a crucible; a strip type surface filament which is spirally wound around the hot wire fixing unit to make one surface face the outer circumference of the crucible; and a power connecting unit which is connected to both ends of the surface filament and supplies power. The strip width of the surface filament is changed according to the height direction of the hot wire fixing unit.