| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an evaluation device which allows for more accurate measurement of the contact load of a contact probe, while suppressing damage on a thin measured object or the contact probe and reducing the cost, and to provide an evaluation method.SOLUTION: Each of a plurality of load cells 3 is configured so that it can be connected with each of a plurality of contact probes 2 included in a group of contact probes 2, when measuring at least the contact load. A load arm 4 can operate to apply a load to the plurality of load cells 3, so that a contact load is applied between the plurality of contact probes 2 and a measured object 21. A control section 8 controls operation of the load arm 4, based on a plurality of contact loads measured by the plurality of load cells 3.</p> |
