发明名称 |
APPARATUS FOR PROCESSING SUBSTRATE |
摘要 |
According to an embodiment of the present invention, an apparatus for processing a substrate includes a process chamber which has an inner space for receiving a substrate transferred from the outside and performs a process for the substrate; and a tube-type heater which is installed along the sidewall of the process chamber, is arranged around the inner space, and has a fluid path through which a cooling medium supplied from the outside flows. |
申请公布号 |
KR101392378(B1) |
申请公布日期 |
2014.05.12 |
申请号 |
KR20130032995 |
申请日期 |
2013.03.27 |
申请人 |
EUGENE TECHNOLOGY CO., LTD. |
发明人 |
YANG, IL KWANG;SONG, BYOUNG GYU;KIM, KYONG HUN;KIM, YONG KI;SHIN, YANG SIK |
分类号 |
H01L21/324;H01L21/02;H01L21/22 |
主分类号 |
H01L21/324 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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