发明名称 PHYSICAL QUANTITY DETECTION DEVICE, PHYSICAL QUANTITY DETECTOR, ELECTRONIC EQUIPMENT, AND MOVING VEHICLE
摘要 PROBLEM TO BE SOLVED: To provide a physical quantity detection device that keeps spurious frequencies constant.SOLUTION: A physical quantity detection device comprises: a base unit 10; a movable unit 14 provided by extending from the base unit 10; a physical quantity detection element 70 connected to the base unit 10 and the movable unit 14; and support units 20, 30, 50, 60 extending from the base unit and whose ends are provided with stationary parts. The support units 20, 30, 50, 60 have recesses that are placed between the stationary parts and the base unit 10 and that are on a surface opposite to a surface where the physical quantity detection element 70 is connected to the base unit 10. The recesses are disposed so as to be along the base unit 10.
申请公布号 JP2014085233(A) 申请公布日期 2014.05.12
申请号 JP20120234484 申请日期 2012.10.24
申请人 SEIKO EPSON CORP 发明人 WATANABE JUN;KAMEDA TAKAHIRO
分类号 G01P15/10 主分类号 G01P15/10
代理机构 代理人
主权项
地址