发明名称 DATA ANALYSIS SYSTEM, AND METHOD FOR SETTING DATA ANALYSIS RANGE
摘要 PROBLEM TO BE SOLVED: To provide a data analysis on a processing unit into which step data indicating a start point of processing and an end point thereof is not inputted.SOLUTION: A data analysis system 10 includes a start point/end point selection part 43 in which two places out of a plurality of places with which process data and event data graph-displayed in a display part 42 are correlated are selected as the start point and the end point, thereby capable of replacing the selected start point and end point by step data.
申请公布号 JP2014086464(A) 申请公布日期 2014.05.12
申请号 JP20120232181 申请日期 2012.10.19
申请人 SUMITOMO PRECISION PROD CO LTD 发明人 MATSUMOTO HITOSHI;MATSUI SHINTARO;SAIMOTO MICHIHIRO
分类号 H01L21/02;G05B19/418 主分类号 H01L21/02
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