发明名称 |
DATA ANALYSIS SYSTEM, AND METHOD FOR SETTING DATA ANALYSIS RANGE |
摘要 |
PROBLEM TO BE SOLVED: To provide a data analysis on a processing unit into which step data indicating a start point of processing and an end point thereof is not inputted.SOLUTION: A data analysis system 10 includes a start point/end point selection part 43 in which two places out of a plurality of places with which process data and event data graph-displayed in a display part 42 are correlated are selected as the start point and the end point, thereby capable of replacing the selected start point and end point by step data. |
申请公布号 |
JP2014086464(A) |
申请公布日期 |
2014.05.12 |
申请号 |
JP20120232181 |
申请日期 |
2012.10.19 |
申请人 |
SUMITOMO PRECISION PROD CO LTD |
发明人 |
MATSUMOTO HITOSHI;MATSUI SHINTARO;SAIMOTO MICHIHIRO |
分类号 |
H01L21/02;G05B19/418 |
主分类号 |
H01L21/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|