| 摘要 |
PROBLEM TO BE SOLVED: To improve drive durability by enabling the prevention of creeping discharge due to deterioration with time, such as long time use in a thin film type piezoelectric optical deflector.SOLUTION: A piezoelectric optical reflector has a movable part 10 having a light reflection surface, torsion bars 20a, 20b of an elastic support member for supporting the movable part 10 rotatably, and drive beams 30a, 30b for supporting the movable part 10 and the torsion bars 20a, 20b in a cantilever fashion with respect to a fixed base 40. The drive beams 30a, 30b are made of beam-shaped members 31a, 31b and thin film piezoelectric members 32a, 32b provided on the beam-shaped members 31a, 31b, and the piezoelectric members 32a, 32b have upper/lower electrodes. Tip angles of the upper electrodes 34a, 34b are formed in the shape of an obtuse angle, such as a circular arcuate shape, here. |
