MOBILE APPARATUS, EXPOSURE EQUIPMENT, AND METHOD FOR MANUFACTURING DEVICE

摘要

PROBLEM TO BE SOLVED: To simplify a structure of a wafer stage device including a planar motor.SOLUTION: Exposure equipment includes a wafer stage device 20 having a surface plate 30. The surface plate 30 includes: a mother board 36 having a plurality of output connectors that can be respectively connected to input connectors of a plurality of coil units 50 constituting a planar motor for driving a wafer stage 24, for distributing power to the plurality of coil units 50 via the input and output connectors; and a manifold plate 34 arranged so as to be overlapped with the mother board 36, and having a plurality of second joints that can be respectively connected to first joints of the plurality of coil units 50, for distributing a coolant to the plurality of coil units 50 via the first and second joints. The plurality of coil units 50 are regularly arranged along one surface of the mother board 36.